Paper Titles
Fabrication and Characterization of 3D Aspheric Microlenses with Arbitrary Surface Profiles Based on a Novel Excimer Laser Contour Scanning Method
p.67
Highly Sensitive Infrared Temperature Sensor for CMOS Compatible Thermopiles
p.73
Diamond Tip Cantilever for Micro/Nano Machining Based on AFM
p.79
Finite Element Analysis of Room Temperature Nanoimprint Lithography Process with Rate Dependent Plasticity
p.85
Transducing Mechanical Forces Using a Polymer Optical Grating Sensor
p.91
Absorption of a Micro-Particle for Laser
p.97
Using the Hot Embossing Technology to Fabricate the Movable Component on Polymer Material
p.103
Effect of Sacrificial Layer Sizes and Fabrication Process on Deformation Caused by Residual Stress of Center-Anchored Circular Plate
p.109
Micro-Anode Guided Electroplating (MAGE) Control System
p.115

Transducing Mechanical Forces Using a Polymer Optical Grating Sensor

Article Preview

Abstract:

A new means of transducing mechanical force using a diffractive Bragg grating based polymeric sensor is presented. The diffraction gratings are successfully fabricated on a polydimethylsiloxane (PDMS) polymer using the holographic interference and micromolding technique. The micro MTS tensile test incorporated with the Raman experiment showed that a relationship between the load and the observed diffraction pattern shift could be obtained. The results show an excellent correlation between the optical measurements and load with a sensitivity of 0.05N.

You might also be interested in these eBooks
Progress on Advanced Manufacture for Micro/Nano Technology 2005 View Preview

Info:

Periodical:

Materials Science Forum (Volumes 505-507)

Pages:

91-96

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.505-507.91

Citation:

Cite this paper

Online since:

January 2006

Authors:

Wei Ching Chuang, Chi Ting Ho, Yi Ru Lian, Ching Kong Chao, Ruey Fang Shyu, Wei Chih Wang

Keywords:

Diffraction Grating, Holographic Interferometry, Micro-Molding, Polymer, Sensor

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

© 2006 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation:

References

[1] M. H. Lee and H. R. Nicholls, Mechatron, vol. 9, no. 1, pp.1-33(1999).

Google Scholar

[2] D.Y. Kim, S.K. Tripathy , L. Li and J. Kumar, Appl. Phys. Lett. 66(10), 1166 (1995).

Google Scholar

[3] H. Nishihara, Y. Handa, T. Suhara and J. Koyama , Proc. SPIE, 134(1980).

Google Scholar

[4] C.Y. Chao C.Y. Chen , C.W. Liu,Y. Chang and C. CYang, Appl. Phys. Lett. 71(17), 2442(1997).

Google Scholar

[5] N. Mukherjee, B.J. Eapen, D.M. Keicher, S.Q. Luong and A. Mukherjee, Appl. Phys. Lett. 67, 3715, (1995).

DOI: 10.1063/1.115359

Google Scholar

[6] A. M. Hawryluk, Ph.D. thesis, Massachusetts Institute of Technology (1981).

Google Scholar

[7] D.J. Kang, J.K. Kim and B.S. Bae, Optical Express, Vol. 12, No. 17, p.3947 (2004).

Google Scholar

[8] J.C. Lotters, W. Olthuis, P.H. Veltink and P., J. Bergveld, Micromech. Microeng. Vol. 7, pp.145-147 (1997).

Google Scholar