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HomeSolid State PhenomenaSolid State Phenomena Vols. 95-96 Microstructural and Electrical Properties of...

Microstructural and Electrical Properties of NiSi₂ Precipitates at Dislocations in Silicon

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Periodical:

Solid State Phenomena (Volumes 95-96)

Pages:

447-452

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.95-96.447

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Online since:

September 2003

Authors:

Michael Seibt, Vitaly V. Kveder

Keywords:

Deep Level Transient Spectroscopy, Dislocation, Metallic Impurities, Silicide Precipitates, Silicon, TEM

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© 2004 Trans Tech Publications Ltd. All Rights Reserved

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