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A Comb Driving Magnetometer Based on Tunnel Effect

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Abstract:

In this paper, a comb-driving tunneling magnetometer based on the tunneling effect is introduced. The designation, manufacture and tests of this magnetometer are discussed, including its structure, FEA analysis, machining processes and test results. The test results indicate that the chip is coincidental with the tunneling effect and the chip is capable of sensing the magnetic signal.

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Periodical:

Solid State Phenomena (Volumes 121-123)

Pages:

561-564

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.121-123.561

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Cite this paper

Online since:

March 2007

Authors:

Xue Hua Tang, Zheng You, Yong Jun Yang, Hong Tao He

Keywords:

Comb Driving, Magnetometer, Micro-Electromechanical System (MEMS), Tunnel Effect

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© 2007 Trans Tech Publications Ltd. All Rights Reserved

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References

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