Micro-Nano Technology XIII

Preface

The Out-Rotator of Spin Traveling Wave Pump on Magnetic Fluid

Authors: Meng Zhao, Ji Bin Zou, Jing Shang

A Monolithic Integrated Pressure Sensor

Authors: Zheng Yuan Zhang, Cao Yang, Yong Mei, Zhi Cheng Feng, Xiao Gang Li, Jian Gen Li, Guo Xiang Hu

A High-Order Curvature-Compensated Bandgap Voltage Reference for Micro-Gyroscope

Authors: Qiang Li, Xiao Yun Tan, Guan Shi Wang

Pull-In Voltage of Parallel-Plate Capacitor Fixed to Double Elastic Supports

Authors: Wu Zhou, Bei Peng, Xiao Hong Hao

Research on Two-Dimensional Scanning Characteristics of MEMS Resonant Mirror

Authors: Chi Zhang, Yun Han Chen, Zheng You, Hu Huang

Design and Fabrication of a MEMS Flexural Plate Wave Device Based on LTO/ZnO/LTO/Si₃N₄ Multilayered Composite Membrane

Authors: Ming Xin Xue, Meng Wei Liu, Xin Li, Jun Hong Li

New Isolation Optimization Method of RF MEMS Capacitive Switches

Authors: Jun Shou Chen, Zheng You, Yong Ruan, Mu Zhi Hu

Design, Fabrication and Characterization of a 5x5 Array of Piezoresistive Stress and Temperature Sensors

Authors: Chuan Guo Dou, Yan Hong Wu, Heng Yang, Xin Xin Li

MEMS Grating with Interdigitated-Comb Structure

Authors: Heng Zhang, Jun Yao, Feng Gang Tao, Xu Ye Zhuang