HomeBob Ogle

Papers by Author: Bob Ogle

Paper TitlePage

Evaluation of Organic Contamination on Si Wafers in Fab Environments

Authors: Joong S. Jeon, Colman Wong, Susanne Ohsiek, Hyeon S. Kim, Bob Ogle

125

Effect of Chemical Oxides Formed During Pre-Gate Oxide Cleaning on the Properties of Sub 20Ǻ Thick Ultra-Thin Stack Gate Dielectrics

Authors: Joong S. Jeon, Bob Ogle

165

Behaviors of Metallic Contaminants in Si Wafer Processing

Authors: Joong S. Jeon, Stefan De Gendt, Srini Raghavan, Marcia Almanza-Workman, Cynthia Gonsalves, Bob Ogle

123

Evaluation of Cleaning Recipes Based on Ozonated Water for Pre-Gate Oxide Cleaning

Authors: Joong S. Jeon, Bob Ogle, M. Baeyens, Paul W. Mertens

119