Papers by Author: Fu Xue Zhang

Abstract: A silicon micro-machined gyroscope without the driven conformation is introduced. The structure of the silicon micro-machined gyroscope are researched and designed to withstand vibration and shock at the request of the rotation carrier. The different methods including changing the epoxy resin and sealing shell with laser are carried out and proofed by experiment verification.

Abstract: The structure and principle of silicon micro-machined gyroscope used for rotating carrier is introduced. The dynamic equations of axially moving are derived by analyzing three-axis moving of MEMS three-axis simulator. The result of simulation shows three moving locus of the head of rolling airframe missile, and three output signals from silicon micro-machined gyroscope which fix on inner plate of three-axis simulator, some rules of three output signals of three moving locus are gained. The signal of the gyroscope couples the frequency of the rotating carrier which makes the coning motion, so the frequency of the coning motion is contained when detecting the frequency of the rotating carrier using the signal of the gyroscope. By analyzing the output signals using Fast Fourier Transform (FFT) algorithm, subtracting the frequency of the rotating carrier, and the relative error is only 1.25% by detecting the self-rotating frequency of the rotating carrier.

Abstract: We report a silicon micro-machined gyroscope without the driven conformation. The output signal of the gyroscope contains the rolling, yawing, and pitching angular rates information. The principle of signal generation of the gyroscope is described with the equation, and the demodulation method of the gyroscope signals is illustrated by the experimental evidences. Toward the end, the key performances of the gyroscope are also presented.

Abstract: With the micromachining technology, two perpendicular cavities are formed on a silicon substrate, and two thermistors whose resistances are equal are placed parallel in each cavity. The nature convention of the gas is produced by the thermistors which are used as both the heater and the sensitive element in the hermetic cavity, and the acceleration can be measured with the temperature difference sensed by the thermistors. At last the test about the sensor shows when the value of acceleration is at the range of ±7g, the non-linearity is less than 0.62%FS.

Abstract: In order to detect the rolling、pitch and yaw angle of high-speed-spin vehicle, a novel attitude sensor system is designed by using a digital signal processor TMS320F2812. The configuration of the sensor consists of two MEMS sensing elements and signal processing circuit and micro-processor. A new silicon MEMS gyroscope based on the Coriolis effect can sense three angular rate of spin vehicle, which can provide a synthesis signal, including roll, yaw and pitch angular rate. And a MEMS accelerometer reacts on demodulating the three angular rates. The design of the hardware circuit, the algorithm and implement of software are presented. The demodulation algorithm is validated by simulation experiment on the ground and the experimental results are presented.