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Papers by Author: Hajime Ugajin

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Evaluation of the Plasmaless Gaseous Etching Process

Authors: Yoshiya Hagimoto, Hajime Ugajin, Daisuke Miyakoshi, Hayato Iwamoto, Yusuke Muraki, Takehiko Orii

7

New Brush Scrubbing Techniques for a Wafer Bevel, Apex and Edge

Authors: Hajime Ugajin, Hayato Iwamoto, Eiji Hide, Nobuyasu Hiraoka, Tsuyoshi Okumura

205

Direct Mixing Cleaning Method of Aqua Regia on Wafer

Authors: Hajime Ugajin, Hayato Iwamoto, Kei Kinoshita

245

Novel Chemical Etching to Correct Film Thickness Distributions

Authors: Hajime Ugajin, Hayato Iwamoto, Kei Kinoshita

111