Papers by Author: Harald Okorn-Schmidt

Paper TitlePage

The Active Role of Etch Products in Particle Removal by SC-1 Solutions
Authors: Alexander Pfeuffer, Wolfgang Bensch, Alfred Lechner, Harald Okorn-Schmidt
181
Electrophoretic Studies on Silicon Nitride: Traces of Silicates in UPW Shift Zeta Potential Similar to SC-1
Authors: Alexander Pfeuffer, Wolfgang Bensch, Alfred Lechner, Harald Okorn-Schmidt
Abstract: In this paper we report on a new method of controlling the zeta potential of Si3N4 particles by addition of silicate traces to neutral ultra pure water (UPW). The positive zeta potential of Si3N4 at neutral pH shifts to negative values similar in alkaline pH solutions (e.g. with ammonia).
163
Behaviour of a Well-Designed Megasonic Cleaning System
Authors: Alexander Lippert, P. Engesser, Garry Ferrell, J. Klitzke, Martin Köffler, Franz Kumnig, Jörg Leberzammer, Rainer Obweger, Alexander Pfeuffer, Harald Okorn-Schmidt, Harry Sax
155
Open Circuit Potential Analysis as a Fast Screening Method for the Quality of High-k Dielectric Layers
Authors: Martine Claes, T. Witters, G. Loriaux, S. Van Elshocht, A. Delabie, Stefan De Gendt, Marc Heyns, Harald Okorn-Schmidt
7
Characterization of DI Water/O3 Oxidation of Si (100) and Si (111) Surfaces by OCP Measurements
Authors: Harald Okorn-Schmidt, C. D'Emic, R. Murphy
161
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