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Articles by author: K. Wolke

• From Piranha to Barracuda: Mechanism of Ozone and Water Vapor Photoresist Strip in a Wet Bench
  Published in: Ultra Clean Processing of Silicon Surfaces V (p227)
• Ozonated DI-Water for Clean Chemical Oxide Growth
  Published in: Ultra Clean Processing of Silicon Surfaces IV (p77)
• Particle Removal Efficiency and Silicon Roughness in HF-DIW/O₃/Megasonics Cleaning
  Published in: Ultra Clean Processing of Silicon Surfaces IV (p27)
• Production Performance of Single Tank Cleaning Processes for 0,25 μm Technology
  Published in: Ultra Clean Processing of Silicon Surfaces IV (p71)