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Papers by Author: Kei Kinoshita

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Direct Mixing Cleaning Method of Aqua Regia on Wafer

Authors: Hajime Ugajin, Hayato Iwamoto, Kei Kinoshita

245

Novel Chemical Etching to Correct Film Thickness Distributions

Authors: Hajime Ugajin, Hayato Iwamoto, Kei Kinoshita

111

High Uniformity Wet Processing for Qxide Thinning and Polymer Cleaning Applications

Authors: Gerald Wagner, Kei Kinoshita, Reinhard Sellmer, Stefan Fichtl

81

Surface Characterization in the Silicon Cleaning Process by a-UPC; Atmospheric Ultraviolet Photoelectron Counting

Authors: Y. Kôzuki, Y. Nakajima, T. Sato, Kei Kinoshita, T. Tsunoda

203