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Articles by author: Kei Kinoshita

• Direct Mixing Cleaning Method of Aqua Regia on Wafer
  Published in: Ultra Clean Processing of Silicon Surfaces VII (p245)
• High Uniformity Wet Processing for Qxide Thinning and Polymer Cleaning Applications
  Published in: Ultra Clean Processing of Silicon Surfaces VI (p81)
• Novel Chemical Etching to Correct Film Thickness Distributions
  Published in: Ultra Clean Processing of Silicon Surfaces VII (p111)
• Surface Characterization in the Silicon Cleaning Process by a-UPC; Atmospheric Ultraviolet Photoelectron Counting
  Published in: Ultra Clean Processing of Silicon Surfaces IV (p203)