Papers by Author: M. Akatsuka

Paper TitlePage

Effect of Heavy Carbon, Nitrogen and Boron Doping on Oxygen Precipitation Behavior in Silicon Epitaxial Wafers
Authors: Koji Sueoka, M. Akatsuka, Mitsuharu Yonemura, T. Ono, Eiichi Asayama, Y. Koike, S. Sadamitsu
49
Oxygen Precipitation Behaviour and Internal Gettering in Epitaxial and Polished Czochralski Silicon Wafers
Authors: Koji Sueoka, M. Akatsuka, Mitsuharu Yonemura, S. Sadamitsu, Eiichi Asayama, T. Ono, Y. Koike, H. Katahama
63
Mechanism of Slip Dislocation Generation by Oxide Precipitates in Czochralski Silicon Wafers
Authors: Koji Sueoka, M. Akatsuka, H. Katahama, N. Adachi
137
Genration of Oxidation Induced Stacking Faults in CZ Silicon Wafers
Authors: Koji Sueoka, M. Akatsuka, K. Nishihara, T. Yamamoto, S. Kobayashi
1737
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