HomeM. Schmidt

Papers by Author: M. Schmidt

Paper TitlePage

Resist Strip and Cu Diffusion Barrier Etch in Cu BEOL Integration Schemes in a Mattson Highlands^TM Chamber

Authors: G. Mannaert, Marc Van Cauwenberghe, M. Schmidt, Jan Van Aelst, D. Hendrickx, M. Stucchi, Thierry Conard, Serge Vanhaelemeersch, Werner Boullart

267

Influence of Frequency on the Removal Efficiency of Nano-Particles in a Megasonic Spray Cleaning Tool

Authors: M. Schmidt, Guy Vereecke, Rita Vos, Frank Holsteyns, M. Baeyens, Paul W. Mertens

147

Influence of Hardware and Chemistry on the Removal of Nano-Particles in a Megasonic Cleaning Tank

Authors: Guy Vereecke, Marc Heyns, Rita Vos, M. Schmidt, Frank Holsteyns, M. Baeyens, S. Gomme, James Snow, Paul W. Mertens, V. Coenen, T. Bauer

143

Rheology and Local Flow Behaviour of Ceramic Slurries in the Tape Casting Head

Authors: Michael Svec, Andreas Roosen, M. Schmidt, H. Münstedt, Thomas Betz, Franz Koppe

219

Structural Investigation of Milled α-Fe and Barium Ferrite Nano-Mixtures

Authors: W.A. Kaczmarek, S.J. Campbell, M. Schmidt

197

Structural Investigation of Milled α-Fe and Barium Ferrite Nano-Mixtures

Authors: W.A. Kaczmarek, S.J. Campbell, M. Schmidt

197

Determination of Subgap-Asorption in μc-Si:H Films by CPM

Authors: R. Krankenhagen, M. Schmidt, W. Henrion, Irina Sieber, S. Koynov, S. Grebner, R. Schwarz

607

Influence of Tunneling on Trapping Kinetics in Thin Layers

Authors: S. Scharf, M. Schmidt, D. Bräunig

Optical and Photoelectrical Properties of Microcrystalline Silicon Layers in Relation to Structural Ordering

Authors: W. Henrion, R. Krankenhagen, M. Schmidt, Irina Sieber, H. Flietner

387

Insulator Investigations in MIS Structures with Constant-Capacitance-DLTS Technique

Authors: H. Koester, M. Schmidt, W. Ecke

471