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Papers by Author: O. Doll

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Application of UV/VIS-Spectroscopy for Determination of Complexing Agent Stability in APM and Like Mixtures Thereof

Authors: O. Doll, Bernd O. Kolbesen

Single Chemistry Cleaning with Complexing Agents (CAs): Determination of CA-Lifetimes by UV/VIS-Spectroscopy

Authors: O. Doll, Bernd O. Kolbesen

Single Chemistry Cleaning Solutions for Advanced Wafer Cleaning

Authors: Rita Vos, Marcel Lux, Sophia Arnauts, Karine Kenis, M. Maes, Bart Onsia, James Snow, Frank Holsteyns, Guy Vereecke, Paul W. Mertens, Marc Heyns, O. Doll, A. Fester, Bernd O. Kolbesen, T. Hackett, Mark Hoffman

Single Chemistry Cleaning Solution for Advanced Wafer Cleaning

Authors: Rita Vos, O. Doll, A. Fester, Bernd O. Kolbesen, Marcel Lux, Karine Kenis, Bart Onsia, S. De Gendt, E. Schellkes, Z. Hatcher, Paul W. Mertens, Marc Heyns

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