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Papers by Author: R. Schmolke

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Characterization of Interstitial-Related Bulk Defects in p^- Silicon Substrates by Epitaxial Deposition

Authors: R. Schmolke, W. Angelberger, Wilfried von Ammon, H. Bender

231

Impact of Hydrogen on Oxygen Precipitation and Gate Oxide Integrity after RTA Processing

Authors: Timo Müller, G. Obermeier, T. Bearda, A. Huber, R. Schmolke, Wilfried von Ammon, Wilfried Lerch

127

On the Mechanism of Defect Suppression in Nitrogen-Doped Silicon Single Crystals

Authors: Wilfried von Ammon, Robert Hölzl, J. Virbulis, E. Dornberger, R. Schmolke, D. Gräf

17

Determination of SC1 Etch Rates at Low Temperatures with Microscope Interferometry

Authors: W. Storm, H.A. Gerber, G.-F. Hohl, M. Naujok, R. Schmolke

275