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Papers by Author: T. Kormàny

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Influence of Preannealing on Oxygen Precipitation

Authors: S. Nouredin, T. Kormàny

173

Oxygen Precipitation in Silicon: Correlation of the Experimental Results Obtained with IR Spectroscopy, Preferential Etching and X-Ray Topography

Authors: Erzsébet Hild, J. Seres, E.K. Pal, S. Nouredin, T. Kormàny

119

Study of the Defect Depth Distribution in Heat Treated Si Wafers by X-Ray Topography

Authors: E.K. Pal, Erzsébet Hild, T. Kormàny, S. Nouredin

1313

Formation of SiO_X Precipitates in Technological Silicon Wafers during Heating Processes: Investigations with Infrared Spectroscopy

Authors: Erzsébet Hild, S. Nouredin, T. Kormàny

195

Precipitation Phenomena in CMOS Technology

Authors: I. Fàbian, T. Kormàny, K. Erdélyi, E.K. Pal

189