Papers by Author: Wolfgang J. Choyke

Abstract: We measured the low temperature wavelength modulated absorption and low temperature photoluminescence spectra of relatively high purity (n~10¹⁴-10¹⁵ cm^-3) 6H SiC boule and epi layers at high wavelength resolution (0.1-0.7 Å) to adequately separate and identify phonon-assisted absorption and recombination processes due to free excitons. As a result we have identified newly resolved or weak features in both spectra which we associate with previously unidentified momentum conserving (MC) phonons. We obtain the energies of 21 of the 36 possible MC phonons in 6H SiC and a more accurate estimate of the exciton bandgap, E_gx = 3.0225±0.0003 eV. In several of the phonon-assisted absorption onsets we also observe fine structure and variations in the measured spin-orbit splitting, which relate to a fourfold splitting of the free exciton energy bands.

Abstract: We use thick, relatively high purity 4H SiC boule material to measure the wavelength modulated absorption spectrum with improved wavelength resolution and sensitivity with respect to previous work. We observe several small 0.6 ± 0.1 meV splittings, which we attribute to electron mass anisotropy and electron-hole exchange interaction. In addition, we identify several features in the absorption spectrum as signatures of nonparabolicity in the free exciton dispersion relations, the primary origin of which is likely the nonparabolic energy dispersion of the valence bands, as revealed by published band structure calculations based on density functional theory.

Abstract: Differential absorption measurements were taken on ultra-pure boule pieces and epitaxial films of 4H SiC. The energy range of particular interest is from 3.40 eV to 3.52 eV. The free exciton energy gap associated with the second lowest conduction band at the M point in the Brillouin zone was determined to be E_GX-2 = 3.4107 eV. This value is obtained from phonon assisted free exciton transitions involving the second conduction band measured in transmission with polarization E⊥c. The energy separation of the two lowest conduction bands is determined to be 144 ± 2 meV. Some replica peaks attributable to the spin orbit splitting in the valence band are also seen.

Abstract: The analysis of the donor-acceptor pair luminescence of P-Al and N-Al pairs obtained recently for the cubic 3C polytype of SiC is viewed in some detail. A detailed consideration is given to the fitting procedure applied to the P-Al and N-Al spectra. Fit with theoretical models of spectra of type I and type II are applied to both N-Al and P-Al experimental spectra, and it is demonstrated that only contribution from P on Si site is observable in the presented samples. The accuracy of the obtained phosphorus ionization energy of 48.1 meV is also discussed.

Abstract: Low doped epitaxial films of 4H SiC irradiated at 1 MeV and electron fluences of 1×1015 cm-2, 3×1015 cm-2 and 1×1016 cm-2 have been used to measure temperatures in two temperature intervals: 580°C to 640°C and 1220°C to 1320°C. Possible accuracy of the temperature measurements is judged to be better than 10 degrees Centigrade. Similar measurements should be possible from 100°C to 1500°C.

Abstract: Ultra-precision machining is dominated by single-crystal diamond cutting tools, and is typically applied to a narrow range of materials, particularly aluminum and copper. Single-crystal SiC can be comparable to some diamonds in hardness and thermal conductivity, while potentially having superior chemical and thermal stability, yet it has not been explored as a cutting tool for ultra-precision machining. We made two cutting tools with single-crystal SiC, one with sharp corners and one with a large circular radius, and used them to cut flat surfaces on two materials, 316 stainless steel and nickel. These materials generally cause unacceptably rapid diamond tool wear. We report the average roughness of the resulting surfaces cut with single-crystal 4H and 6H SiC tools.

Abstract: We report measured and calculated frequencies of elastic waves propagating in columnar porous 4H-SiC, an analytically tractable system. The sample was prepared using photo-electrochemical etching followed by mechanical polishing. The frequencies were measured using Brillouin scattering spectroscopy in backscattering geometry. The effective elastic constants, ordinary and extraordinary indices of refraction, and mass density, all obtained using effective medium models, are used to calculate the frequencies. Although the quasistatic limit is not strongly satisfied, the agreement between the measured and calculated values is good.

Abstract: Aluminum-doped 4H-SiC samples were either irradiated with high-energy electrons (170 keV or 1 MeV) or implanted with a box-shaped He+-profile. Admittance spectroscopy (AS) and deep level transient spectroscopy (DLTS) were employed to search for defect centers. AS spectra of as-grown as well as of electron-irradiated (170 keV or 1 MeV) 4H-SiC epilayers reveal the Al acceptor (ΔE(Al) = 200 meV) and an unknown defect (ΔE(SB) = 177 meV), while AS spectra of the He+-implanted and annealed sample show in addition to the Al-acceptor two energetically deeper acceptor-like defect centers (ΔE(RE3) = 255 meV and ΔE(KR3) = 375 meV). The KR3-center is not directly formed by the He+-implantation, it requires an annealing process. The DLTS spectra of the He+-implanted and annealed sample resolve a double-peak structure of the KR3-defect (ΔE(KR3A) = 380 meV and ΔE(KR3B) = 410 meV).

Abstract: This paper comprises a systematic study of the thermal stability of defect centers observed in n- and p-type 4H-SiC by deep level transient spectroscopy (DLTS); the defects are generated by irradiation with high-energy electrons of 170 keV or 1 MeV.

Abstract: In this paper we describe an effort to find correlations between low temperature photoluminescence spectroscopy (LTPL) and deep level transient spectroscopy (DLTS) of electron irradiated samples annealed from 25 °C to 1700 °C in 100 °C steps. We report on thermal histories of defect centers created by 170 keV and 1 MeV electron irradiation, as observed by LTPL only. The DLTS results on "twin" samples are presented in a separate paper. Our results indicate that in n-type 4H SiC there is no correlation between the Z1/Z2 center in DLTS and the L1 peak of the DI center seen in LTPL. In p-type 4H SiC we do not find a correlation between a 350 meV DLTS peak above the valence band and the LTPL L1 peak of the DI center. Consequently, we cannot find evidence for a 350 meV ground state postulated in the “Pseudo–Donor” model [3].