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Papers by Author: Y.B. Kim

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New Contact Cleaning in HF & N2/H2 Microwave Plasma

Authors: Y.B. Kim, Jeong Ho Kim, Yong Mann Lee, Gil Gwang Lee, Jung Yup Kim, Ja Chun Ku, Jae Ok Ryu

239

Angle Resolved XPS Characterization of the Formation of Cl and Br Bonds in Poly-Silicon Etching and Its Cleaning

Authors: Y.B. Kim, B. Beckx, Serge Vanhaelemeersch, W. Vandervorst

153

The Optimization of the Cleaning to Remove Residual Bonds of Si-C and Si-F after Fluorocarbon Plasma Etch on the Silicon Surface

Authors: Y.B. Kim, Mikhail R. Baklanov, Thierry Conard, Serge Vanhaelemeersch, W. Vandervorst

291

Characterization of the Post Dry Etch Cleaning of the Silicon Surface Prior to Silicon Epitaxial Growth

Authors: Y.B. Kim, Matty Caymax, H. Bender, Serge Vanhaelemeersch

97