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Papers by Keyword: Electron Beam Doping

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Diodes Fabricated by Electron Beam Doping (Superdiffusion)Technique in Semiconductors at Room Temperature

Authors: Takao Wada, Hiroshi Fujimoto

23

Surface Diffusion of Atoms by Electron Beam Doping (Superdiffusion)

Authors: Takao Wada, Hiroshi Fujimoto, Haruho Masuda

1625

Interstitials in Silicon Produced by Electron Beam Doping (Superdiffusion)

Authors: Takao Wada, Takashi Hagino, Hiroshi Fujimoto, Haruho Masuda

1613

Enhanced Diffusion of Impurities into Solids by Electron Beam Doping

Authors: Takao Wada, Hiroshi Fujimoto, Haruho Masuda

1607

Superdiffusion in Semiconductors (Electron-Beam Doping)

Authors: Takao Wada

13

U-Shaped Diffusion Profiles of Zn Atoms in GaAs by Electron Beam Doping

Authors: A. Takeda, T. Wada

1421

Electron Beam Doping of Si and Zn Impurities into GaAs

Authors: T. Wada, Mikako Takeda, A. Takeda

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