HOME CONTACT My eBook

Username: Password:

> @scientific.net

Articles by keyword: «Epitaxial Wafers»

• Effect of Heavy Carbon, Nitrogen and Boron Doping on Oxygen Precipitation Behavior in Silicon Epitaxial Wafers
  Published in: Gettering anf Defect Engineering in Semiconductor Technology IX (p49)
• Gettering in Advanced Low Temperature Processes
  Published in: Gettering and Defect Engineering in Semiconductor Technology VII (p53)
• Oxygen Precipitation Behaviour and Internal Gettering in Epitaxial and Polished Czochralski Silicon Wafers
  Published in: Gettering and Defect Engineering in Semiconductor Technology VIII (p63)
• Silicon Wafer Requirements for ULSI Device Processing
  Published in: Gettering anf Defect Engineering in Semiconductor Technology IX (p1)