Process Realization of Preparing the Plane Transient Diode

Yu An; You Lin Wu

doi:10.4028/www.scientific.net/AEF.4.125

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HomeAdvanced Engineering ForumAdvanced Engineering Forum Vol. 4Process Realization of Preparing the Plane...

Process Realization of Preparing the Plane Transient Diode

Abstract:

The process flows of preparing the plane transient diode have been described in this paper. The process purpose, the process conditions, the process steps and the process methods of each part in flows have been also analyzed in detail. At the same time, the process technology of the qualified transient diodes has been also experimentally discussed, which has provided the foundation for the production.

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Periodical:

Advanced Engineering Forum (Volume 4)

Pages:

125-130

DOI:

https://doi.org/10.4028/www.scientific.net/AEF.4.125

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Online since:

June 2012

Authors:

Yu An, You Lin Wu

Keywords:

Cleaning, Diffusion, Epitaxy, Oxidation, Photolithography

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Creative Commons CC BY 4.0

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