Genetic Algorithm Based Multidisciplinary Design Optimization of MEMS Accelerometer
Multidisciplinary design optimization of a biaxial capacitive micro-accelerometer with the crab-leg flexural suspension is discussed. Considering the influence of microstructure design, fabrication process and detection circuit, as well as the constraints of fabrication limitations, damp design and adhesion factor, a multidisciplinary optimization model is developed by global criterion method. Furthermore, genetic algorithm is applied to obtain the multi-objective optimum of the proposed multidisciplinary design model.
Di Zheng, Yiqiang Wang, Yi-Min Deng, Aibing Yu and Weihua Li
Y. Liu et al., "Genetic Algorithm Based Multidisciplinary Design Optimization of MEMS Accelerometer", Applied Mechanics and Materials, Vols. 101-102, pp. 530-533, 2012