Genetic Algorithm Based Multidisciplinary Design Optimization of MEMS Accelerometer

Abstract:

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Multidisciplinary design optimization of a biaxial capacitive micro-accelerometer with the crab-leg flexural suspension is discussed. Considering the influence of microstructure design, fabrication process and detection circuit, as well as the constraints of fabrication limitations, damp design and adhesion factor, a multidisciplinary optimization model is developed by global criterion method. Furthermore, genetic algorithm is applied to obtain the multi-objective optimum of the proposed multidisciplinary design model.

Info:

Periodical:

Edited by:

Di Zheng, Yiqiang Wang, Yi-Min Deng, Aibing Yu and Weihua Li

Pages:

530-533

DOI:

10.4028/www.scientific.net/AMM.101-102.530

Citation:

Y. Liu et al., "Genetic Algorithm Based Multidisciplinary Design Optimization of MEMS Accelerometer", Applied Mechanics and Materials, Vols. 101-102, pp. 530-533, 2012

Online since:

September 2011

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Price:

$35.00

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