Genetic Algorithm Based Multidisciplinary Design Optimization of MEMS Accelerometer

Abstract:

Multidisciplinary design optimization of a biaxial capacitive micro-accelerometer with the crab-leg flexural suspension is discussed. Considering the influence of microstructure design, fabrication process and detection circuit, as well as the constraints of fabrication limitations, damp design and adhesion factor, a multidisciplinary optimization model is developed by global criterion method. Furthermore, genetic algorithm is applied to obtain the multi-objective optimum of the proposed multidisciplinary design model.

• Periodical: Applied Mechanics and Materials (Volumes 101-102)
• Pages: 530-533
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.101-102.530
• Online since: September 2011
• Authors: Yu Liu, Hong Yun Yang, Guo Chao Wang
• Keywords: Genetic Algorithm (GA), MEMS Accelerometer, Multidisciplinary Design Optimization

References

[1] W J Li and W Zh Yuan: Journal of Mechanical Strength Vol. 26( 2004), p.170.

[2] Y Q Wang, H L Chen, X M He: Journal of Xi'an Jiao Tong University Vol. 40(2006), p.1305.

[3] J X Dong: Micromachined Inertial Instruments—Microaccelerometer (Tsinghua University Press, China 2003).

[4] H W Liu: Mechanics of Materials (Higher Education Press, China 2004).

[5] Ferdinand P. Beer, E. Russell Johnston, John T. DeWolf: Mechanics of Materials (Tsinghua University Press, China 2003).

[6] W J Li, B F Song, X Sh Sun, et al: Structural Optimization and Design of Aircraft (National defense industry Press, China 2005).

[7] Y J Lei: MATLAB Genetic Algorithm Toolbox and Its Application (Xidian University Press, China 2005).