Study on a Micro-Force Generated Mechanism for Sensor Calibration

Abstract:

The current method of micro-force generated for sensor calibration is scarcity and complexity. In the paper we propose a mechanism based on flexible hinges for micro-force, illustrate its working principle and establish the mechanical model. By theoretical analysis the analytical expression of the force reduction multiplier is derived. After initializing some parameters, the result shows that this mechanism can produce the large range and high resolution force of µN. The force can be applied in calibration of micro-force sensor.

• Periodical: Applied Mechanics and Materials (Volume 103)
• Pages: 292-298
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.103.292
• Online since: September 2011
• Authors: Yong Wang, Jing Hui Sun, Zheng Shi Liu, Huan Jin Liu
• Keywords: Calibration, Flexible Hinges, Mechanical Model, Micro-Force, Sensor

References

[1] L. John, Wilkin, Hernan G Arango, Dale B. Haidvogel: Jouranal of Geophysical Research, Vol. 110( 2005).

[2] J. Blandin, R Person, I M Suout: Proc. Underwater Technology, Tokyo, 16-19 April 2002, pp.111-115.

[3] Committee on seafloor Observatories, Challenges and Opportunities, Illuminating the Hidden Planet: The Future of Seafloor Observatory Science, (National Academies Press , Washington, DC, USA: 2000).

DOI: 10.17226/9920

[4] Wenlin Jin, C.D. Mote, Jr. Jouranal of Microelectromechanical Systems, Vol. 7(1998), pp.156-163.

[5] Nathaniel P. Selden, Andrew D. Ketsdever: Review of Scientific Instruments, Vol. 74(2003), pp.5249-5254.

[6] C. J. Kim, Silicon electromechanical microgrippers: Design, fabrication and testing, Ph.D. dissertation, Univ. Calif., Berkeley, CA, (1991).

[7] W. H. Chu, Microfabricated tweezers with a large gripping force and a large range of motion, Ph. D. dissertation, Western Reserve University, (1994).

[8] Mengwei Liu, Tianhong Cui, Weijie Dong: Procee dings of the 6th World Congresson Intel1igent Contro1and Automation Review of Advancements in Micro and Nano Technologie, Vol. 10(2006). (in chinese).

[9] Xide Li, Dongchuan Su, Zhao Zhang: Sensors and Actuators, 2009, P. 13-23.

[10] Fushi xue, qingxiang Li: Design of Precison(Tsinghua University Press, Beijing 1991). (in chinese).

[11] Jingzhi Du, Lining Sun: Jouranal of Harbin Institute of Technology Vol. 38(2006), pp.1469-1478. ( in chinese ).

[12] Xingyong Zuo, Xiaoming Liu: Chinese Journal of Scientific Instrument 2006, Vol. 27 (2006), pp.1725-1728. (in chinese).