A Study of Temperature Dependence for Capacitive Pressure Sensor

Hao Jie Lv; Guo Qing Hu; Xing Ye Wang

doi:10.4028/www.scientific.net/AMM.105-107.2024

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 105-107A Study of Temperature Dependence for Capacitive...

A Study of Temperature Dependence for Capacitive Pressure Sensor

Abstract:

In order to reveal the temperature dependence of a touch mode capacitive pressure sensor, temperature dependence of material parameters of the sense have been studied. Using Finite Element Method (FEM) to simulate and solve capacitance, the results show that the relation of capacitance and temperature is almost linear in touch state of the sensor. At the same time, temperature sensitivities under different pressure are slight difference, which are 0.0056pF/K and 0.0040pF/K, respectively. Therefore, the high-temperature performance of the sensor is greatly outstanding.

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Periodical:

Applied Mechanics and Materials (Volumes 105-107)

Pages:

2024-2027

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.105-107.2024

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Online since:

September 2011

Authors:

Hao Jie Lv, Guo Qing Hu, Xing Ye Wang

Keywords:

Capacitive Pressure Sensor, Temperature Dependence, Thermo-Mechanical Analysis (TMA)

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