A Study of Temperature Dependence for Capacitive Pressure Sensor

Abstract:

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In order to reveal the temperature dependence of a touch mode capacitive pressure sensor, temperature dependence of material parameters of the sense have been studied. Using Finite Element Method (FEM) to simulate and solve capacitance, the results show that the relation of capacitance and temperature is almost linear in touch state of the sensor. At the same time, temperature sensitivities under different pressure are slight difference, which are 0.0056pF/K and 0.0040pF/K, respectively. Therefore, the high-temperature performance of the sensor is greatly outstanding.

Info:

Periodical:

Edited by:

Paul P. Lin and Chunliang Zhang

Pages:

2024-2027

DOI:

10.4028/www.scientific.net/AMM.105-107.2024

Citation:

H. J. Lv et al., "A Study of Temperature Dependence for Capacitive Pressure Sensor", Applied Mechanics and Materials, Vols. 105-107, pp. 2024-2027, 2012

Online since:

September 2011

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Price:

$35.00

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