Design and Fabrication of a Micro-Capacitor for Nano Probing System

Abstract:

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Quantitative dimensional metrologies of Nano/microstructures are increasingly demanded following the rapid developments in, for instance, semiconductor and precision engineering industry, microsystem technology and materials science. In the recent years, coordinate measuring machines (CMMs) have become versatile and widespread metrology tools. Probing system is an important component of a CMM. A probing system based on a high accurate positioning transducer is crucial for micro and nano metrology. This paper presents a probing system based on a variable micro-capacitive transducer which has advantages of simple structure, low cost, high sensitivity, overload ability, excellent dynamic response characteristics, etc. The structure of variable capacitor was designed and optimized by means of finite element method (FEM), and fabricated by surface micromachining technology.

Info:

Periodical:

Edited by:

Paul P. Lin and Chunliang Zhang

Pages:

2255-2258

DOI:

10.4028/www.scientific.net/AMM.105-107.2255

Citation:

M. X. He et al., "Design and Fabrication of a Micro-Capacitor for Nano Probing System", Applied Mechanics and Materials, Vols. 105-107, pp. 2255-2258, 2012

Online since:

September 2011

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Price:

$35.00

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