Design and Fabrication of a Micro-Capacitor for Nano Probing System

Abstract:

Quantitative dimensional metrologies of Nano/microstructures are increasingly demanded following the rapid developments in, for instance, semiconductor and precision engineering industry, microsystem technology and materials science. In the recent years, coordinate measuring machines (CMMs) have become versatile and widespread metrology tools. Probing system is an important component of a CMM. A probing system based on a high accurate positioning transducer is crucial for micro and nano metrology. This paper presents a probing system based on a variable micro-capacitive transducer which has advantages of simple structure, low cost, high sensitivity, overload ability, excellent dynamic response characteristics, etc. The structure of variable capacitor was designed and optimized by means of finite element method (FEM), and fabricated by surface micromachining technology.

• Periodical: Applied Mechanics and Materials (Volumes 105-107)
• Pages: 2255-2258
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.105-107.2255
• Online since: September 2011
• Authors: Ming Xuan He, Xin Lu, Xin Chen, Xing Ling, Yuan Li, Hong Wang, Gui Fu Ding
• Keywords: CMM, Finite Element Method (FEM), Micro-Electromechanical System (MEMS), Probing System, Variable Capacitive Transducer

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