The Research on Key Technology of Digital Probe Instrument

Abstract:

The digital probe instrument is used for measure the microwave impedance of electronic circuit, which request both the precision and resolution of 3d displacement of the probe at the level of 1~2μm.As there are a lot of the points to be measured, it is a high labor intensity and low efficient work when person moving and positioning the right position through high magnification microscopy only by eyes, as well as some points that should be measured are easily ignored. A double-3d displacement sliding table consists of grating digital system is proposed in the paper, which could solve the problems successfully.

• Periodical: Applied Mechanics and Materials (Volumes 130-134)
• Pages: 2604-2607
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.130-134.2604
• Online since: October 2011
• Authors: Qian Ying Zhu, Bao Guang Wang
• Keywords: 3D Displacement, Measurement, Positioning, Probe Instrument

References

[1] Jin Si-jia, Xu Jin and Wang Zhen-jie, in: Smart probe temperature controller[J], Electronic Design Engineering, TaiYuan, 1999, 17 (11): pp.30-31.

[2] Xu Zi-min and Li Xiao-min, in: Design of probe positioning system[J], Control Technology of PLC, GuangZhou, project.

[3] Zhang Dong and Liu Guang-liang, in: Application of two-dimensional Hotline probe in measurement on three-dimensional flow[J], Journal of Shenyang Institute of Aeronautical Engineering, ShanDong, 2008, 25 (3): pp.31-33, 94.

[4] Hong Pei-zhi, Measuring Optical[M], Beijing: Weapons Industry Press, (1992).

[5] Ma Jun, Li Shao-yi, Sun Li and Yan Jie, Analysis of the Interaction Between CCD Driving Circuit Design and Image Quality [J], Measurement Technology, 2001, 30 (3): pp.5-7.

[6] Ran Feng, Yang Hui and Huang Shu-ping, Design of Real-time Color Video Capture System for Area Array CCD[J], Optics and Precision Engineering, 2010, 18(1): pp.274-280.