The Research on Key Technology of Digital Probe Instrument

Abstract:

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The digital probe instrument is used for measure the microwave impedance of electronic circuit, which request both the precision and resolution of 3d displacement of the probe at the level of 1~2μm.As there are a lot of the points to be measured, it is a high labor intensity and low efficient work when person moving and positioning the right position through high magnification microscopy only by eyes, as well as some points that should be measured are easily ignored. A double-3d displacement sliding table consists of grating digital system is proposed in the paper, which could solve the problems successfully.

Info:

Periodical:

Edited by:

Han Zhao

Pages:

2604-2607

DOI:

10.4028/www.scientific.net/AMM.130-134.2604

Citation:

Q. Y. Zhu and B. G. Wang, "The Research on Key Technology of Digital Probe Instrument", Applied Mechanics and Materials, Vols. 130-134, pp. 2604-2607, 2012

Online since:

October 2011

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Price:

$35.00

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