In this paper, tensile fatigue properties of 316L stainless steel thin sheets with a thickness of 0.1 mm are studied. The tests are implemented by using micro mechanical fatigue testing sysytem (MMT-250N) at room temperature under tension-tension cyclic loading. The S-N curve of the thin sheets descends continuously at low cycle region. Cyclic σ-N curve and ε-N curve are obtained according to the classical macroscopical fatigue theory. The results agree well with the experimental fatigue data, showing that the traditional fatigue research methods are also suitable for description of MEMS fatigue in a certain extent. The effect factor of frequency was considered in this study and the results show that the fatiuge life and the fatigue strength are increased as loading frequency increasing.