A Novel MEMS CPW Structure

Abstract:

This paper presents a novel MEMS coplanar microwave waveguide (CPW) structure. The high-resistivity silicon is chosen as the material of substrate and the aluminum is as the metal transmission line because of its high conductivity ,Removing the silicon between the signal line and ground line, underneath the edge of both line,these can effectly reduce the loss.A layer of polyimide is added between the metal and silicon substrates continued to reduce the loss. The simulation results from HFSS show and demonstrate the insert loss is less than the results of traditional CPW.

• Periodical: Applied Mechanics and Materials (Volume 151)
• Pages: 170-174
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.151.170
• Online since: January 2012
• Authors: Zhong Liang Deng, Hong Lai Qu, Yuan Zhi Chen
• Keywords: Coplanar Waveguide (CPW), CPW, Insertion Loss, Micro-Electromechanical System (MEMS)

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