Design of Fast Scanning Langmuir Probe Diagnostic System Suitable for Transient Arc Plasma Diagnosis in Arc Ion Plating

Abstract:

In order to detect the arc plasma, an in-depth analysis on the relationship between the technology and film properties is conducted in this article. In addition, a fast scanning Langmuir probe diagnostic system suitable for transient plasma diagnosis is also designed, coupled with the design scheme and schematic diagram. Regard the integrated circuit of MAX038 as the core，and utilize FET to input high-fidelity operational amplifier OPA604 as well as high power amplifier PA93 to complete the intelligent saw-tooth wave sweep frequency power with the output amplitude of ± 100V, output frequency ranging from 10Hz to 10MHz as well as the adjustable frequency and duty cycle. Then test the output waveform and the results show that the power module can precisely generate triangle wave, saw-tooth wave, rectangular wave (including square wave) and sine wave signal.

• Periodical: Applied Mechanics and Materials (Volumes 152-154)
• Pages: 1711-1716
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.152-154.1711
• Online since: January 2012
• Authors: Wen Chang Lang, Xiang Hong Wang, Xiu Rong Nan
• Keywords: Arc Ion Plating (AIP), Arc Plasma, Langmuir Probe Diagnostic System, Power Module

References

[1] W C Lang, J Q Xiao, J Gong, et al. Vacuum, 2010, 84: 1111.

[2] Boxman R L, Zhitomirsky V N. Rev. Sci. Instrum, 2006, 77: 6748.

[3] Z X Li, S L Zhang, Z Yuan, et al. Vacuum. 1994, 4: 25.

[4] K X Lin, X Y Lin, Y P Yu, et al. Journal of Functional Materials. 1996, 27: 392.

[5] J Y Zou, L Yan, Z Y Chen, et al. Microfabrication Technology. 1997, 1: 70.

[6] L F Chi, K X Lin, X Y Lin, et al. Vacuum. 1999, 6: 20.

[7] Apex Micro-technology. Power Integrated Circuit Data Book Volume10.