Duplex Hard Coatings with Aditional Ion Implantation

Branko Skoric; D. Kakaš; G. Favato; A. Miletić; M. Arsenovic

doi:10.4028/www.scientific.net/AMM.157-158.1320

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 157-158Duplex Hard Coatings with Aditional Ion...

Duplex Hard Coatings with Aditional Ion Implantation

Abstract:

In this paper, we present the results of a study of TiN thin films which are deposited by a Physical Vapour Deposition (PVD) and Ion Beam Assisted Deposition (IBAD). In the present investigation the subsequent ion implantation was provided with N2+ ions. The ion implantation was applied to enhance the mechanical properties of surface. The thin film deposition process exerts a number of effects such as crystallographic orientation, morphology, topography, densification of the films.. A variety of analytic techniques were used for characterization, such as scratch test, calo test, Scanning electron microscopy (SEM), Atomic Force Microscope (AFM), X-ray diffraction (XRD) and Energy Dispersive X-ray analysis (EDAX).

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Periodical:

Applied Mechanics and Materials (Volumes 157-158)

Pages:

1320-1323

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.157-158.1320

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Online since:

February 2012

Authors:

Branko Skoric, D. Kakaš, G. Favato, A. Miletić, M. Arsenovic

Keywords:

Coating, Ion Implantation, Nanohardness, Steel, Super Hard

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References

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