For Libraries For Publication Open Access Downloads About Us Contact Us
Paper Titles
Properties and Synthesis of a Novel Unsymmetrical Photochromic Diarylethene Functional Material
p.259
Recovery of Precious Metal Material Ni from Nickel Containing Wastewater Using Electrolysis
p.263
Preparation and Performance of Si/Al/C Composites Anode Material Prepared by Glucose-Modified
p.268
Toxic Effect of Cadmium Material on Eisenia fetida
p.272
The Effects of the Sputter-Etching Power on the Formation of Conical Protrusions on the Surface of SUS304 Stainless Steel
p.276
Efficient Synthesis and Properties of a Novel Unsymmetrical Photochromic Diarylethene Material Based on Pyrazolyl Group
p.280
The Effects of the Self-Assembly Time on the Preparation of Lanthanum-Based Thin Films on Sulfonated 3-Mercaptopropyl Trimethoxysilane
p.284
Feasibility of Reutilizing Municipal Solid Waste Incineration Residues as Construction Materials
p.289
Preparation and Electrochemical Performance of Li4Ti5O12 as Anode Material for Li-Ion Battery by Solid State Method
p.293

The Effects of the Sputter-Etching Power on the Formation of Conical Protrusions on the Surface of SUS304 Stainless Steel

Article Preview

Abstract:

SUS304 stainless steel samples were sputter-etched by a radio frequency (RF) magnetron sputtering apparatus. Correlation between the formation of conical protrusions on the steel surface and sputter power was discussed. The results show that the conical protrusion precipitates both uniformly and densely on the surface with the power being 600W, the anode-to-substrate distance being 50mm, the argon gas flow ratio being 50sccm and the sputter-etching time being 6h. The roughness of the samples sputter-etched at various sputtering powers for 6h was analyzed. According to the results, sputter-etching brings about the development of surface roughness, which in turn may affect the sputter-etching process

You might also be interested in these eBooks
Applied Mechanics, Materials, Industry and Manufacturing Engineering View Preview

Info:

Periodical:

Applied Mechanics and Materials (Volume 164)

Pages:

276-279

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.164.276

Citation:

Cite this paper

Online since:

April 2012

Authors:

Tao Bai, Qing Lian Zhang

Keywords:

Protrusion, Radio Frequency, Sputter-Etching, SUS304 Stainless Steel

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

© 2012 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation:

References

[1] D. Depla , R. De. Gryse: Surf. Coat. Technol Vol. 183(2004), p.196.

Google Scholar

[2] D. Chen, D. Xu, J. J. Wang, et al: Vacuum Vol. 83(2009), p.282.

Google Scholar

[3] Q. L. Zhang, R.G. Wang, M. Kato, et al: J. Jpn. Inst. Met Vol. 69(2005), p.312.

Google Scholar

[4] B. Feddes, J. G. C . Wolke: Jansen J A, et al. J. Appl. Phys Vol. 93(2003), p.662.

Google Scholar

© 2025 Trans Tech Publications Ltd. All rights are reserved, including those for text and data mining, AI training, and similar technologies. For open access content, terms of the Creative Commons licensing CC-BY are applied.
Scientific.Net is a registered trademark of Trans Tech Publications Ltd.