On-Line Measuring System Using Isotope to Gauge Film Thickness

Li Zong Lin; Tao Wang; Ji Sheng Zhang

doi:10.4028/www.scientific.net/AMM.190-191.1021

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 190-191On-Line Measuring System Using Isotope to Gauge...

On-Line Measuring System Using Isotope to Gauge Film Thickness

Abstract:

On-line system was developed to gauge film thickness using isotope, by which the problem of difficulty in measuring wide film thickness was resolved. Two-point method, determining working curve of gauging system, was introduced, by which time spent on experiment could be decreased, and adaptability of working curve under different condition was improved. After analyzing measuring errors, emendation method for every error source was discussed .Method taking count of pulse number within a period of time was applied, by which measuring precision was improved, so this method can be used widely in other applications .This measuring system has obtained satisfying effect in measuring film thickness, and products can be bought in market .

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Periodical:

Applied Mechanics and Materials (Volumes 190-191)

Pages:

1021-1028

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.190-191.1021

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Online since:

July 2012

Authors:

Li Zong Lin, Tao Wang, Ji Sheng Zhang

Keywords:

Error Analysis, Film Thickness Gauge, Frequency Measurement, Isotope

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