Modeling and Performance Analysis for Cluster Tools Based on SPN

Abstract:

For analysis the performance of cluster tools, Stochastic Petri nets model was used to describe the serial process procedure of cluster tools and the operation sequence of the robot. The firing rate of transition represents the frequency of activities. In order to improve the scalability of the model, the modular approach is used to model. Firstly the sub-models of tool’s modules were developed. Then according to the process procedure, all the sub-models were combined to construct a Petri nets model. Finally, the firing rates are added to every transition. Markov process approach was used to analyze model. Some performance measures equation are deduced, such as the throughput, the utilization of process chamber, the utilization of the robot and the wafer residency rate in process chamber. Petri nets models and performance measures equation developed in paper can assist performance analysis and verify the effectiveness of scheduling algorithm.

• Periodical: Applied Mechanics and Materials (Volumes 190-191)
• Pages: 111-114
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.190-191.111
• Online since: July 2012
• Authors: Xiu Hong Zheng
• Keywords: Cluster Tools, Markov Process, Model, Performance, Stochastic Petri Nets

References

[1] J. R. Morrison, D. P. Martin. Performance Evaluation of Photolithography Cluster Tools, OR Spectrum, Vol. 29, 2007, pp.375-389.

[2] R. S. Srinivasan. Modeling and Performance Analysis of Cluster Tools using Petri Nets, IEEE Transactions on Semiconductor Manufacturing, Vol. 11, 1998, pp.394-403.

DOI: 10.1109/66.705374

[3] W. M. Zuberek. Timed Petri Nets in Modeling and Analysis of Cluster Tools, IEEE Transactions on Robotics and Automation, Vol. 17, 2001, pp.562-575.

DOI: 10.1109/70.964658

[4] W. M. Zuberek. Cluster Tools with Chamber Revisiting-modeling and Analysis using Timed Petri Nets, IEEE Transactions on Semiconductor Manufacturing, Vol. 17, 2004, pp.333-344.

DOI: 10.1109/tsm.2004.831524

[5] N. Q. Wu, M. C. Zhou. Analysis of Wafer Sojourn Time in Dual-arm Cluster Tools with Residency Time Constraint and Activity Time Variation, IEEE Transactions on Semiconductor Manufacturing, Vol. 13, 2010, pp.53-64.

DOI: 10.1109/tsm.2009.2039243

[6] X. H. Zheng, J. T. Hu, H. B. Yu. Research on a Simulation Platform Assisting Analysis of the Cluster Tool, 2011 International Conference on Systems Engineering and Modeling, vol. 4 , 2011, pp.249-253.

[7] M. K. Molloy. Performance Analysis Using Stochastic Petri Nets", IEEE Transactions on Computers, 1982, pp.913-917.

DOI: 10.1109/tc.1982.1676110

[8] R. Y. Al-Jaar, A. A. Desrochers. Performance Evaluation of Automated Manufacturing Systems Using Generalized Stochastic Petri Nets, IEEE Transactions on Robotics and Automation, Vol. 6, 1990, pp.621-639.

DOI: 10.1109/70.63259