An Ultrasonic Knife System for MEMS Packaging

Jin Sha; Zhi Yuan Yao; Yang Jiao

doi:10.4028/www.scientific.net/AMM.190-191.23

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 190-191An Ultrasonic Knife System for MEMS Packaging

An Ultrasonic Knife System for MEMS Packaging

Abstract:

This paper proposes an ultrasonic knife system for MEMS packaging. The ultrasonic knife system is consisted of an ultrasonic transducer, a cutter and a gripper feeder. The ultrasonic transducer engenders high frequency vibration, which lead to the resonance of the structure. Amplitude transformer can magnify the amplitude. By the impact and collision of the cutter, the material can be cut through, and the high temperature created by high-frequency vibration can do the welding. The structure is designed and optimized by the finite element method, and a model machine is produced. According to the experimental results, the ultrasonic knife system has the virtues of high cutting force and better wedding feature, which are suitable for MEMS packaging.

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Periodical:

Applied Mechanics and Materials (Volumes 190-191)

Pages:

23-27

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.190-191.23

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Online since:

July 2012

Authors:

Jin Sha, Zhi Yuan Yao, Yang Jiao

Keywords:

Cutting Force, Finite Element Analysis (FEA), Ultrasonic Knife System, Ultrasonic Welding

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