Research on Stochastic Modeling of MEMS Gyroscope

Abstract:

The majority of MEMS based gyroscopes currently under development operates in a vibratory mode and measures the angular rate instead of the absolute angle. The paper aims to establish the system dynamics models of the typical MEMS Gyro: Vibration Micro-gyroscope and analyzes the dynamic features. With different precision MEMS Gyros as the example, the detailed Times-series analysis are made of AR (6) and ARMA (2, 1) models, the impact of considering the estimation effective and the precision improved

• Periodical: Applied Mechanics and Materials (Volume 192)
• Pages: 356-359
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.192.356
• Online since: July 2012
• Authors: Ya Fei Ren, Xu Can Bai, Yun Wang Ge
• Keywords: Micro Electro-Mechanical Systems Gyroscope, Stochastic Filtering, Time-Series Analysis

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