A Mathematical Model for Electrostatic Actuators Operation with Multilayer Metallic Strip

Xiang Rong Xu; Dong Qing Shi; Fu Qiang Chen; Xin Qiang Pan

doi:10.4028/www.scientific.net/AMM.201-202.508

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A Mathematical Model for Electrostatic Actuators Operation with Multilayer Metallic Strip

Abstract:

This paper presents a mathematical model to simulate the actuation of a multilayer metallic strip. The model computes the radius of curvature of the actuator when it curls because of difference in thermal coefficient of the different metals used in the strip. The mathematical model for simulating the radius of curvature is based on the earlier work by Timoshenko [4], and Jianyu Fu[5]. The radius of curvature computed is used to calculate the voltage to uncurl the actuator. Numerical experiments were performed on the model and the trends were found to be in agreement with the experimental data.