Development of 1×4 MEMS Multifunction Integrated Optical Device

Qing Hua Chen; Ying Jun Chen; Yan Mei Li; Wen Gang Wu

doi:10.4028/www.scientific.net/AMM.249-250.551

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 249-250Development of 1×4 MEMS Multifunction Integrated...

Development of 1×4 MEMS Multifunction Integrated Optical Device

Abstract:

A 14 compound-driven MEMS-based optical device with optical switch and variable optical power attenuating functions has been proposed to optimally serve multifunctional optical fiber-based networking applications. The device manipulates the light with binary-slope mirrors driven by compound electrostatic actuator. The optical model for switching is investigated. Performances of the fabricated devices assembled with ball-lensed fibers are measured and discussed. Measurements reveal that the insertion loss of the device is less than 2.6 dB and the controllable attenuation range is more than 40 dB for the switching and attenuation function, respectively.

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Periodical:

Applied Mechanics and Materials (Volumes 249-250)

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551-556

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.249-250.551

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Online since:

December 2012

Authors:

Qing Hua Chen, Ying Jun Chen, Yan Mei Li, Wen Gang Wu

Keywords:

Fiber Optic Networking, MEMS, Multifunction, Optical Switching, Variable Optical Attenuating

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