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Development of 1×4 MEMS Multifunction Integrated Optical Device

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Abstract:

A 14 compound-driven MEMS-based optical device with optical switch and variable optical power attenuating functions has been proposed to optimally serve multifunctional optical fiber-based networking applications. The device manipulates the light with binary-slope mirrors driven by compound electrostatic actuator. The optical model for switching is investigated. Performances of the fabricated devices assembled with ball-lensed fibers are measured and discussed. Measurements reveal that the insertion loss of the device is less than 2.6 dB and the controllable attenuation range is more than 40 dB for the switching and attenuation function, respectively.

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Periodical:

Applied Mechanics and Materials (Volumes 249-250)

Pages:

551-556

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.249-250.551

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Online since:

December 2012

Authors:

Qing Hua Chen, Ying Jun Chen, Yan Mei Li, Wen Gang Wu

Keywords:

Fiber Optic Networking, MEMS, Multifunction, Optical Switching, Variable Optical Attenuating

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© 2013 Trans Tech Publications Ltd. All Rights Reserved

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References

[1] Sunish Mathews, Gerald Farrell and Yuliya Semenova, Experimental demonstration of an all-fiber variable optical attenuator based on liquid crystal infiltrated photonic crystal fiber, Microwave Opt Technol Lett, Vol. 53 (2011) No. 3, pp.539-543.

DOI: 10.1002/mop.25789

Google Scholar

[2] J.M. Walker, The future of MEMS in telecommunications networks, J. Micromech. Microeng, Vol. 10 (2000), pp. R1-R7.

DOI: 10.1088/0960-1317/10/3/201

Google Scholar

[3] Zeng Yun, Liu Wen, Chen Long, Luo Yong and Xiao Qingming, A 1 × 2 Variable Optical Power Splitter Development, 1566 J. Lightw. Technol., Vol. 24 (2006) No. 3, pp.1566-1570.

DOI: 10.1109/jlt.2005.863231

Google Scholar

[4] Pablo A. Costanzo-Caso, Michael Gehl, Sergio Granieri and Azad Siahmakoun, Optical bistable switching with symmetrically configured SOAs in reverse bias, Microwave Opt Technol Lett, Vol. 52 (2010) No. 12, pp.2753-2759.

DOI: 10.1002/mop.25594

Google Scholar

[5] Yao-Joe Yang, Wen-Cheng Kuo, Kuang-Chao Fan and Wu-Lang Lin, A 1 × 2 optical fiber switch using a dual-thickness SOI process, J. Micromech. Microeng. Vol. 17 (2007), p.1034–1041.

DOI: 10.1088/0960-1317/17/5/025

Google Scholar

[6] T. S. Lim, C. H. Ji, C. H. Oh, H. Kwon, Y. Yee, and J. U. Bu, Electrostatic MEMS variable optical attenuator with rotating folded micromirror, IEEE J. Sel. Topics Quantum Electron., Vol. 10 (2004) No. 3, p.558–162, May/Jun.

DOI: 10.1109/jstqe.2004.828492

Google Scholar

[7] Wu, et al Design and use of compact lensed fibers for low cost packaging of optical MEMS components, IEEE J. Micromech. Microeng. Vol. 14 (2004), pp.1367-1375.

DOI: 10.1088/0960-1317/14/10/011

Google Scholar

[8] M. W. Pruessner, N. Siwak, K. Amarnath, S. Kanakaraju, W. -H. Chuang and R. Ghodssi, End-coupled Optical waveguide MEMS Devices in the Indium Phosphide Material System, IEEE J. Micromech. Microeng., Vol 16 (2006), pp.832-842.

DOI: 10.1088/0960-1317/16/4/021

Google Scholar