Force Sensitive Property of Same-Base Quartz Crystal Resonator and Signal Amalgamation

Abstract:

According to the stress distribution in the thin round-shaped quartz plate with radial force, multiple resonators are designed in the different positions on same quartz crystal wafer. The force sensitive property of the resonators in different positions is studied. The research result shows, the force sensitive property of the resonator is closely related to the locations and the adding force azimuth; the force sensitive property of the resonators in different positions have a significant difference. If making difference frequency process of the resonant frequencies which is produced by the resonators, the interfering factors of the temperature etc. can be inhibited; if making superposition and integration process of the resonators’ force sensitive property, the total force sensitive property of the resonator with the multiple-electrode structure can be improved.

• Periodical: Applied Mechanics and Materials (Volume 252)
• Pages: 81-84
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.252.81
• Online since: December 2012
• Authors: Wen Jie Tian, Qing Jiang Zhao, You Bin Sun, Bai Yang Lan
• Keywords: Adding Force Azimuth, Force Sensitive Property, Same-Base Quartz Crystal Resonator, Signal Amalgamation, Signal Superposition

References

[1] Zheyao Wang, Huizhong Zhu, Yonggui Dong, Jinsong Wang, etal. Force-Frequency Coefficient of Symmetrical Incomplete Circular Quartz Crystal Resonator. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control , 2001, Vol. 48, pp.1471-1479.

DOI: 10.1109/58.949758

[2] Wang Zheyao. Effect of transverse force on the performance of quartz resonator force sensors. IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, Vol. 51, No. 4, APRIL 2004. pp.470-476.

DOI: 10.1109/tuffc.2004.1295433

[3] CHEN Min, Temperature compensation and application of quartz pressure gauge. Journal of Transducer Technology, 2003, Vol. 22, No. 11, pp.63-65.

[4] Feng guanping, Wang xiaohong, Wang jinsong. Review of Stress-Frequency Effect of Quartz Crystal Resonators and Its Applications. Journal of Tsinghua University (Sci & Tech), 1998, Vol. 38, No. 8, pp.35-38.

[5] Tian Wenjie, Lu Junling, Liu Lingling, Zhang Fuxue. The Characteristics and Applications of a Shear-Vibrating Quartz Crystal Resonator. Journal of Piezoelectrics & Acoustooptics, 2006, Vol. 28, No. 2, pp.150-152.

[6] B.B. Маrов, Piezoelectric Resonance Sensors . (Shanchen Weng). Beijing: national defense industrial publishing company, (1984).