The Error Analysis and Compensation of Two-Dimensional Precision Positioning Platform

Abstract:

Through measuring and analyzing the location error of two-dimensional precision positioning system based on the motion control card, and according to the deficiency of the first error compensation, a strategy that enhance addition based on first error compensation was put forward. That using closed loop control to compensate and correct the location error makes the positioning accuracy improved obviously, and achieves an ideal compensation effect. Under the loading conditions, X axial positioning accuracy reached 11μm, Y axial positioning accuracy reached 10μm.

• Periodical: Applied Mechanics and Materials (Volumes 268-270)
• Pages: 1380-1384
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.268-270.1380
• Online since: December 2012
• Authors: Mu Cheng Zhu, Xian Peng Luo, Ya Ping Wang
• Keywords: Error Compensation, Error Correction, Positioning Accuracy, Precision Positioning Platform

References

[1] Ding Han, Zhu Li-min, Lin Zhong-qin. The precise positioning and operation of high-speed system applied in chip [J]. Scientific Development, 2003,13(6):368-375

[2] YAN Zu-gen, SUN Lining, HUANG Bo, Research of a Novel XY-table based on error compensation [C], Proceedings of the IEEE International Conference on Mechatronics& Automation Niagara Falls. Canada: IEEE, 2005:61-64

DOI: 10.1109/icma.2005.1626523

[3] Chen Li-guo, Sun Li-ning etc, Macro/Micro Positioning Technique for Micromanipulation [J]. Modular Machine Tool & Automatic Manufacturing Technique, 2005(5):49-51

[4] Pahk Heui Jae, Lee Dong Sung, Park JongHo. Ultra precision positioning system for servomotor-piezo actuator using the dual servo loop and digital filter implementation [J]. Machine Tools& Manufacture, 2001, 41:51-63

DOI: 10.1016/s0890-6955(00)00061-4

[5] Yan Zu-gen, Sun Li-ning. A novel precision positioning table based on real-time yaw error compensation [J]. Journal of Harbin Institute of Technology, 2009,41(12):290-294

[6] Cheng Wei-ming, Sun Lin-zhi, Zhang Hai-tao. Improvement of positioning precision for precise stage with compensation [J]. Optics and Precision Engineering, 2008, 16(5):884-888

[7] Wang Bao-sheng, Zuo Jian-min, Wang Mu-lan. Analysis, Control and Compensation for Nonlinear Error of High Precision Machine Tool [J]. Machine Tool & Hydraulics, 2007, 35(11):35-38

[8] Fei Ye-tai. Error Theory and Data Processing [M]. Bei Jing: China Machine Press, 2010, 6:57-80

[9] Li Gui-cheng. Measurement Error and Data Processing Theory [M]. Chang Chun: Ji Lin University Press, (1991)

[10] Huang Chang-yi, Lu Wen-xiang etc. Mechanical Engineering Measurement and Testing technology [M]. Bei Jing: China Machine Press, (2000)