Periodic Nano-Structure Formation with Femtosecond Laser Ablation and Patterning of Silicon

Jian Ting Xu; Dong Qing Yuan

doi:10.4028/www.scientific.net/AMM.275-277.2186

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 275-277Periodic Nano-Structure Formation with Femtosecond...

Periodic Nano-Structure Formation with Femtosecond Laser Ablation and Patterning of Silicon

Abstract:

Regular micro-apparatus which covered with periodic nano-hole, nano-ridge and ripple structures on silicon bulk were formed by laser micro-machining with tightly focused beam of the femtosecond laser with wavelength of 800 nm, repetition rate of 1 kHz and the pulse length of 130 fs in air. The periodic nano-hole structures which focus with a 20× focusing objective lens (NA = 0.4) is reported. Investigating the relationship between the width of structures and the speed of processing.

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Periodical:

Applied Mechanics and Materials (Volumes 275-277)

Pages:

2186-2189

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.275-277.2186

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Online since:

January 2013

Authors:

Jian Ting Xu, Dong Qing Yuan

Keywords:

Femtosecond Laser, Microstructure, Patterning, Ripples

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