Properties of RF Magnetron Sputtered Sr_0.4Ba_0.6Nb_1.85Ta_0.15O₆ Thin Films

Abstract:

Sr0.4Ba0.6Nb1.85Ta0.15O6 (SBNT) ceramic was used as a target and SBNT thin films were deposited at room temperature. After deposition, the SBN thin films were annealed in conventional furnace (CFA) and in an oxygen atmosphere for 1h by changing the temperature from 700oC to 900oC. The thicknesses of the SBN thin films were calculated by SEM and they were about 450nm independent on the annealing temperature. From the XRD patterns, the as-deposited SBNT thin films displayed amorphous phase, whereas as CFA-treatment was used, the SBNT thin films displayed smooth surfaces. The grain sizes also increased with increasing CFA-treated temperature. In addition, the remanent polarization and saturation polarization increased and coercive field decreased with increasing CFA-treated temperature. Finally, the lnJ-E1/2 curves of the SBNT thin films was developed to find that the linear variations of leakage current densities correspond either to the Schottky emission mechanism or to the Poole-Frenkel emission mechanism.

• Periodical: Applied Mechanics and Materials (Volumes 284-287)
• Pages: 193-197
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.284-287.193
• Online since: January 2013
• Authors: Cheng Fu Yang, Wen Cheng Tzou
• Keywords: Annealing, Current Density, Polarization, Thin Film

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