Research on Compensation Method of Coupled Error in High-Precision Micro-Machining Process

Article Preview

Abstract:

In this paper, a compensation method of coupling error used in high-precision turning machine is proposed. The laser interferometer and optical lens are used for measuring coupling error of machine; the precise motion characteristic of the micro-adjusting mechanism is utilized for compensating. In the end, this method is verified by experiments, and the results show that the motion accuracy of the test bench has been effectively improved.

You might also be interested in these eBooks

Info:

Periodical:

Pages:

1397-1402

Citation:

Online since:

February 2013

Export:

Price:

Permissions CCC:

Permissions PLS:

Сopyright:

© 2013 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation:

[1] Ping Yang, Tomohiko Takamura, Satoru Takahashi: Calibration for Multiple Motion Errors of X-Y Table on Micro-coordinate Measuring Machine(M-CMM) by Utilizing Multi-probe Scanning Method, ISUPEN2011, Tokyo, Japan(2011).

Google Scholar

[2] Kuang Cuifang, Feng Qibo, Zhang Bin: Study of the Method for Measuring Four-Degree-of-Freedom Geometric Errors of a Linear Stage, Chinese Journal of Lasers Vol. 32 (2005), pp.1266-1270.

Google Scholar

[3] Cao Rui, Zhang Bin, Feng Qibo: A Method for Roll-Angle Measurement in Multi-Degree-of-Freedom Measuring System, Acta Optica Sinica Vol. 28 (2008), pp.2344-2348.

DOI: 10.3788/aos20082812.2344

Google Scholar

[4] Zhang Zhijing, Jin Xin, Zhou Min: Precise and Microminiature Manufacturing Theory, Technology and Its Appliance, Chinese Journal of Mechanical Engineering Vol. 43 (2007), p.49~61.

DOI: 10.3901/jme.2007.01.049

Google Scholar

[5] Su Heng, Hong Maisheng, Wei Yuanlei, et al: On-line Measurement of Machine Tools Straight-going Parts Motion Error, Chinese Journal of Mechanical Engineering Vol. 39 (2003), p.8~12.

DOI: 10.3901/jme.2003.03.008

Google Scholar

[6] Fan Shengbo, Wang Taiyong, Wang Wenjin, et al: Prediction of Diameter Errors Compensation in Bars Turning, Journal of Central South University of Technology Vol. 12 (2005), p.264~268.

DOI: 10.1007/s11771-005-0056-3

Google Scholar

[7] Daisuke Kono, Atsushi Matsubara, Iwao Yamaji, et al: High-precision Machining by Measurement and Compensation of Motion Error, International Journal of Machine Tools & Manufacture Vol. 48 (2008), p.1103 ~1110.

DOI: 10.1016/j.ijmachtools.2008.02.005

Google Scholar

[8] Tu Chieh Hung, Shao Heng Chang, Chi Hsien Ding, et al: Improvement of Residual Error in Hydrodynamic Polishing by Recursive Error Compensation Strategy, Microelectronic Engineering Vol. 93 (2012), p.27~34.

DOI: 10.1016/j.mee.2011.12.011

Google Scholar

[9] John M. Finesa, Arvin Agahb: Machine tool positioning error compensation using artificial neural networks, Engineering Applications of Artificial Intelligence(2008), 21: 1013~1026.

DOI: 10.1016/j.engappai.2007.10.001

Google Scholar