Tribological Properties of DLC Films Deposited at Different Time under Low Temperature

Abstract:

The tribological properties of DLC(Diamond like carbon) films deposited for different time on mono-crystalline silicon were investigated by using the UMT-2 micro friction and wear tester. The surface topography, composition and hardness of the films were determined by three-dimensional topography instrument, Raman spectrum and nano mechanics tester. The worn surface topography of the films deposited for different time were observed by scanning electron microscopy. The results show that the thickness of the films deposited for different time is nonlinearly increased with the deposition time. The films are the standard nano-films. The surface hardness of the films is low because the films contain hydrogen composition and the deposition temperature is very low. The films deposited for different time have a good anti-friction property, which is improved when the deposition time is prolonged.

• Periodical: Applied Mechanics and Materials (Volume 310)
• Pages: 133-138
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.310.133
• Online since: February 2013
• Authors: Wen Gang Chen, Shi Rong Ge
• Keywords: Component, Deposited Time, DLC Film, Friction Coefficient (FC), Silicon, Wear

References

[1] Beake B. D., Bell G. A., Goodes S. R., et al. Improved nanomechanical test techniques for surface engineered materials. Surface Engineering, 2010, 26(1-2): 37-49.

DOI: 10.1179/174329409x451137

[2] Dearnley, P. A., Neville, A., Turner, S., et al. Coatings tribology drivers for high density plasma technologies. Surface Engineering, 2010, 26(1-2): 80-96.

DOI: 10.1179/174329409x451218

[3] R. Arvind Singh, Eui-Sung Yoon. Friction of chemically and topographically modified Si(100) surfaces. wear. 2007, 263: 912~919.

DOI: 10.1016/j.wear.2007.01.059

[4] Bharat Bhushan. Nanotribology and nanomechanics of MEMS/NEMS and BioMEMS/BioNEMS materials and devices. Microelectronic Engineering. 2007, 84: 387~412.

DOI: 10.1016/j.mee.2006.10.059

[5] Ashok Kumar, U. Ekanayake, J.S. Kapat. Characerization of pulsed laser-deposited diamond-like carbon films. Surface and Coating Technology, 102(1998): 113-118.

DOI: 10.1016/s0257-8972(97)00686-5

[6] M. Rubio-Roy, E. Pascual, M. C. Polo, et al. Structural and optical properties of diamond like thin films deposited by asymmetric bipolar pulased-DC reactive magnetron sputtering. Surf. Coat. Technol. 2008, 202: 2354-2357.

DOI: 10.1016/j.surfcoat.2007.08.044

[7] A. Czyzniewski. Preparation and characterization of a-C and a-C:H coatings depositied by pulsed magnetron sputtering. Surf. Coat. Technol. 2009,203: 1027-1033.

DOI: 10.1016/j.surfcoat.2008.09.027

[8] Y. Funada, K. Awazu, H. Yasui, et al. Adhension strength of DLC films on glass with mixing layer prepared by IBAD. Surf. Coat. Technol. 2000,128-129: 308-312.

DOI: 10.1016/s0257-8972(00)00591-0

[9] X. Yu, X. Zhang, C. B. Wang, et al. Structural, mechanical and frictional properties of tetrahedral amorphous carbon film by filtered cathodic vacuum arc system. Surf. Coat. Technol. 2007, 201:4995-4998.

DOI: 10.1016/j.surfcoat.2006.07.194

[10] Daniel Franta , David Nečas, Lenka Zajíčková, et al. Band structure of diamond-like carbon films assessed from optical measurements in wide spectral range. Diamond & Related Materials, 19(2010): 114-122.

DOI: 10.1016/j.diamond.2009.08.003

[11] Chen, C. P., Tan, A. H.. Wear corrosion properties of DLC films with different C(2)H(2) gas flows and CN layer of magnetic recording disks. Surface Engineering, 2009, 25(7): 496-501.

DOI: 10.1179/026708408x370212

[12] ZHANG Wei; ZHANG Shu; TANAKA Akihiro, et al. Friction and Wear Behavior of Diamond-like Carbon Multilayer Films in Different Environments. Tribology, 2006, 26(6): 510-515.(in Chinese)

[13] Chen, C. P., Tan, A. H.. Characterisation and microcorrosion of DLC ultrathin films with acetylene and ethylene source gases by PECVD. Surface Engineering, 2011, 27(3): 151-157.

DOI: 10.1179/174329409x409396