Ultra-Precision Flycutting Microstructures on Brittle Materials

Yong Liu; Chao Liang Guan; Zi Qiang Yin; Yong Shu

doi:10.4028/www.scientific.net/AMM.310.63

Paper Titles

The Preparation and Performance of Gypsum-Based Composites
p.46

Acoustic Emission Monitoring for Delaminated Composites under Bending Damage Failure Condition
p.51

Influence of Pretreatment Process on Microstructure and Properties of 65Mn Steel after Subcritical Quenching
p.55

Annealing Time Dependence on the Phase Equilibria and Thermoelectric Property of Type-I Ba₈Cu₆Ag₂Si₃₈ Clathrate
p.59

Ultra-Precision Flycutting Microstructures on Brittle Materials
p.63

VOC Gas Sensor Based on ZnO Synthesized by Sol–Gel Process and Improvement in Gas Sensitivity by Adding TiO₂
p.67

Preparation for Humidity Control Composite Paperboard and their Humidity Control Properties
p.71

Purification of Anthocyanins from Black Hulls by AB-8 Macroporous Resin
p.76

Influence Factors of Calcium Carbonate Whiskers Prepared by Intermittent Bubbling Method
p.80

HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vol. 310Ultra-Precision Flycutting Microstructures on...

Ultra-Precision Flycutting Microstructures on Brittle Materials

Abstract:

Ultra-precision microstructures on brittle materials are critical components in optical communication industry. The requirements for Ultra-precision microstructures manufacturing are increasing recently. Traditional etching and deposition technology can not satisfy the demands of accuracy and efficiency. Ultra-precision flycutting process is presented to machining microstructures on brittle materials. The geometric model of flycutting is analyzed. A formula is established to describe the relationship between the effective cutting depth and cutting parameters. The critical depth for brittle to ductile transition is obtained by cutting experiments with varying cutting depth on quartz glass. The ductile cutting chips are achieved in fly-cutting process. A microgroove array with optical quality is obtained. It proves that ultra-precision flycutting process is an available method to manufacture microstructures with optical quality on brittle materials.