Design of Optical Fiber MEMS Displacement Sensor

Xiao Long Li; Jian Gan Wang; Ya Ming Wu

doi:10.4028/www.scientific.net/AMM.312.766

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vol. 312Design of Optical Fiber MEMS Displacement Sensor

Design of Optical Fiber MEMS Displacement Sensor

Abstract:

Introducing a new intensity modulated optic microphone theory model, it can be used in infrasound sensor field. Single-mode optical fiber to transmit and receive light and optical lens to collimate is used to realize light intensity modulation, the system also contains MEMS membrane to be compatible with vibration displacement. Through the analysis of membrane size and the change of pressure, the related parameters about the sensitivity of fiber optic displacement sensor could be acquired. Simulation results show that the proper choice of parameters can make the sensitivity of sensor improve in orders of magnitude than traditional light intensity modulated methods.

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Periodical:

Applied Mechanics and Materials (Volume 312)

Pages:

766-770

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.312.766

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Online since:

February 2013

Authors:

Xiao Long Li, Jian Gan Wang, Ya Ming Wu

Keywords:

MEMS, Modulation, Sensor

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References

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