Design and Simulation of Pressure Sensor for Ocean Depth Measurements

K.J. Suja; Bhanu Pratap Chaudhary; Rama Komaragiri

doi:10.4028/www.scientific.net/AMM.313-314.666

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 313-314Design and Simulation of Pressure Sensor for Ocean...

Design and Simulation of Pressure Sensor for Ocean Depth Measurements

Abstract:

MEMS (Micro Electro Mechanical System) are usually defined as highly miniaturized devices combining both electrical and mechanical components that are fabricated using integrated circuit batch processing techniques. Pressure sensors are usually manufactured using square or circular diaphragms of constant thickness in the order of few microns. In this work, a comparison between circular diaphragm and square diaphragm indicates that square diaphragm has better perspectives. A new method for designing diaphragm of the Piezoresistive pressure sensor for linearity over a wide pressure range (approximately double) is designed, simulated and compared with existing single diaphragm design with respect to diaphragm deflection and sensor output voltage.

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Periodical:

Applied Mechanics and Materials (Volumes 313-314)

Pages:

666-670

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.313-314.666

Citation:

Cite this paper

Online since:

March 2013

Authors:

K.J. Suja, Bhanu Pratap Chaudhary, Rama Komaragiri

Keywords:

Double Diaphragm, Linearity, MEMS, Piezoresistive Pressure Sensor, Sensitivity, Single Diaphragm

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References

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