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Thermal Heating Effect on Structural and Mechanical Property of Diamond-Like Carbon Film Prepared by Filtered Cathodic Arc

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Abstract:

Diamond-like carbon (DLC) films were deposited on magnetic recording head by Filtered Cathodic Arc (FCA) technique and a-Si base material was ion beam deposited as seed layer. To investigate the thermal stability of stack film, repeated cycle thermal heating at 200 °C was employed. Raman spectroscopy and nanoindenter (Hysitron) were performed to understand film structure and mechanical property as a function of thermal heating conditions. The roles of heating in material composition and wear behavior of DLC films are discussed. The Raman spectra revealed that G position, FWHM of G peak and Id/Ig change as with increasing heating cycle which agreed well with wear depth measured. With these results suggesting DLC film degraded with repeated heating at 200 °C.

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Periodical:

Applied Mechanics and Materials (Volumes 313-314)

Pages:

82-85

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.313-314.82

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Online since:

March 2013

Authors:

Nattaporn Khamnaulthong, Krisda Siangchaew, Pichet Limsuwan

Keywords:

Diamond-Like Carbon (DLC), Raman Spectroscopy, Thermal Heating, Wear

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© 2013 Trans Tech Publications Ltd. All Rights Reserved

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