Progress and Research Status of CO₂ Laser Machining Polymer Microfluidic Chips

Abstract:

CO2 laser rapidly patterning microfluidic chips on polymer substrate with direct writing ablation had attracted many experts from domestic and foreign in resent years. This method had features of flexible, rapid, easily controllable and high efficient, and was regarded as the most potentialized fabrication method to improve the development of microfluidic systems. This paper systematically reviewed polymer substrate materials, the mechanism of laser and material, fabrication models and factors influenced the fabrication process, as well as the influence on microfluidic chips fabrication quality by laser process parameters. Moreover, the existent problems and possible resolutions based on the mechanisms of interactions between laser and materials was analyzed.

• Periodical: Applied Mechanics and Materials (Volumes 316-317)
• Pages: 1007-1013
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.316-317.1007
• Online since: April 2013
• Authors: Heng Fu Xiang, Li Jun Zhang
• Keywords: CO₂ Laser Machining, Laser Ablation, Microfluidic Chip, PMMA, Polymer, Surface Quality

References

[1] Lin Yucheng, "Microfluidic chips laboratory and functionalizatio", Journal of China Pharmaceutical University,2003,vol.34,pp.1-6.

[2] Darwin R. Reyes, "Dimitri Iossifidis, Pierre-Alain Auroux, etal. Micro Total Analysis Systems. introduction, theory,and technology", Anal. Chem, 2002, vol.74,pp.2623-2636.

DOI: 10.1021/ac0202435

[3] Alyssa C Henry, Emanuel A. Waddell, Rubina Shreiner, etal., "Control of electroosmotic flow in Laser-ablated and chemically modified hot imprinted poly(ethylene terephthalate glycol) microchannels", Anal.Chem.,2002, vol.74,pp.871-878.

DOI: 10.1002/1522-2683(200203)23:5<791::aid-elps791>3.0.co;2-k

[4] Larry J. Kricka, Paolo Fortina, Nicholas J. Panaro, etal, "Fabrication of plastic microchips by hot embossing", Lab Chip, 2002, vol.2,pp.1-4.

DOI: 10.1039/b109775j

[5] Klank H,Kutter J P, Geschke O, "CO2-Laser Micromachining and back-end processing for rapid production of PMMA-based microfluidic systems", Lab on a Chip, 2002, vol.2,pp.242-246.

DOI: 10.1039/b206409j

[6] Martin F. Jensen, Mikkel Noerholm, etal, "Microstructure fabrication with a CO2 laser system,pp. characterization and fabrication of cavities produced by raster scanning of the laser beam", Lab Chip, 2003, vol.3,pp.302-307.

DOI: 10.1039/b308153b

[7] Snakenborg D, Klank H, Kutter J P, "Microstructure fabrication with a CO2 laser system", Journal of Micromechanics and Microengineering, 2004, vol.14,pp.182-189.

DOI: 10.1088/0960-1317/14/2/003

[8] Xiang Hengfu Fu Jianzhong Chen Zichen,"Transient ablation model for laser machining polymer microfluidic chips",Journal of Zhejiang University(Engineering Science),2005,vol.39,pp.1920-1924

[9] Hsu YC, Chen TY, "Applying Taguchi methods for solventassisted PMMA bonding technique for static and dynamic μ-TAS devices", Biomed Microdevices,2007,vol.9,pp.513-522

DOI: 10.1007/s10544-007-9059-1

[10] Dajun Yuan, Suman Das, "Experimental and theoretical analysis of direct-write laser micromachining of polymethylmethacrylate by CO2 laser ablation", Journal of applied physics, 2007, vol.101,pp.249011-249016.

DOI: 10.1063/1.2409621

[11] Heng Qi,Xiansong Wang,Tao Chen,Xuemei Ma, Tiechuan Zuo, "Fabrication and characterization of a polymethyl methacrylate continuous-flow PCR microfluidic chip using CO2 laser ablation", Microsyst Technol, 2009, vol.15,pp.1027-1030.

DOI: 10.1007/s00542-009-0843-0

[12] L. Romoli, G.Tantussi, G. Dini, "Experimental approach to the laser machining of PMMA substrates for the fabrication of microfluidic devices", Optics and Lasers in Engineering, 2011, vol.49,pp.419-427.

DOI: 10.1016/j.optlaseng.2010.11.013

[13] Ji-Yen Cheng, Cheng-Wey Wei, Kai-Hsiung Hsu, Tai-Horng Young, "Direct-write laser micromachining and universal surface modification of PMMA for device development", Sensors and Actuators B,2004, vol.99,pp.186-196.

DOI: 10.1016/j.snb.2003.10.022

[14] C K Chung,Y C Lin, G R Huang, "Bulge formation and improvement of the polymer in CO2 laser micromachining", J.Micromech. Microeng.,2005, vol.55,pp.1878-1884.

DOI: 10.1088/0960-1317/15/10/013

[15] Zhu Lianyi, Liu Chong, Li Jingmin, "Bulge formation of PMMA during CO2 laser cutting of microfluidic chip", Journal of functional materials and devices,2008, vol.14,pp.534-538.

[16] J.M. Li, C. Liu, L. Y. Zhu, "The formation and elimination of polymer bulges in CO2 laser microfabrication", Journal of Materials Processing Technology,2009,vol.209,pp.4814-4821.

DOI: 10.1016/j.jmatprotec.2009.01.001

[17] Ting-Fu Hong,Wei-Jhong Ju,Ming-Chang Wu,Chang-Hsien Tai,Chien-Hsiung Tsai, Lung-Ming Fu, "Rapid prototyping of PMMA microfluidic chips utilizing a CO2 laser", Microfluid Nanofluid, 2010, vol.9,pp.1125-1133.

DOI: 10.1007/s10404-010-0633-0

[18] J. Paulo Davim,Nuno Barricas, Marta Conceicao, Carlos Oliveira, "Some experimental studies on CO2 laser cutting quality of polymeric materials", Journal of materials processing technology,2010, vol.198,pp.99-104.

DOI: 10.1016/j.jmatprotec.2007.06.056

[19] Alicia Guek Geok Toh, Sum Huan, Ng Zhenfeng Wang, "Fabrication and testing of embedded microvalves within PMMA microfluidic devices", Microsyst Technol,2009, vol.15,pp.1335-1342.

DOI: 10.1007/s00542-009-0821-6

[20] Alicia Guek Geok Toh, Sum Huan, Ng Zhenfeng Wang, "Fabrication and testing of embedded microvalves within PMMA microfluidic devices", Microsyst Technol,2009, vol.15,pp.1335-1342.

DOI: 10.1007/s00542-009-0821-6

[21] J.Paulo Davim,Carlos Oliveira, Nuno Barricas, "Evaluation of cutting quality of PMMA using CO2 lasers", Int J Adv Manuf Technol, 2008, vol.35,pp.875-879.

DOI: 10.1007/s00170-006-0766-1