MRR Prediction in Micro Channel Grooving Process by Ultra-Fast Pulse Laser

Abstract:

Ultra-fast pulse laser is a popular tool in the Micro/nano channel fabrication. The final machining result is affected by numerous factors. To fulfill the design requirement and obtain a satisfactory machining quality and accuracy, screening the suitable parameter combination before experiment can save time and cost. This paper uses an integrated model of five prominent engineer parameters in a grooving process to plan the machining process. Additionally, some parameters in the model are adjustable during the machining process, the machining efficiency and fine finish are balanced due to prediction the evolution of the grooving.

• Periodical: Applied Mechanics and Materials (Volume 318)
• Pages: 350-355
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.318.350
• Online since: May 2013
• Authors: Gang Chang, Yi Liu Tu
• Keywords: Grooving, Laser Micro Machining, Parameter Screening, Prediction Model

References

[1] A. Borowiec et al, Wavelength dependence of the single pulse femtosecond laser ablation threshold of indium phosphide in the 400–2050 nm range, App. Surf. Sci. 243 (2005) 129–137

DOI: 10.1016/j.apsusc.2004.09.105

[2] H. Jeschke, M. Garcia, M. Lenzner, J. Bonse, J. Kr¨uger, and W. Kautek, Laser ablation thresholds of silicon for different pulse durations: theory and experiment. Appl. Surf. Sci. 197-198(2002) 839–844

DOI: 10.1016/s0169-4332(02)00458-0

[3] B. N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A.Tünnermann, Femtosecond, picosecond and nanosecond laser ablation of solids, Appl. Phys. A. 63(1996) 109−115

DOI: 10.1007/bf01567637

[4] S. Eaton, H. Zhang, P. Herman, F. Yoshino, L. Shah, J. Bovatsek, and A. Arai, Heat accumulation effects in femtosecond laser-written waveguides with variable repetition rate, Optics Express, 13, Issue 12(2005) 4708-4716

DOI: 10.1364/opex.13.004708

[5] H. R. Lange , M. A. Franco , J. Ripoche , B. Prade , P. Rousseau , A. Mysyrowicz,  Reconstruction of the time profile of femtosecond laser pulses through cross-phase modulation IEEE Journal of Selected Topics in Quantum Electronics 4, 2 (1998) 292-300

DOI: 10.1109/2944.686735

[6] Y. Suzaki and A. Tachibana, Measurement of the μm sized radiusof Gaussian laser beam using the scanning knife-edge, Appl. Opt. 14 (1975) 2809−2810

DOI: 10.1364/ao.14.002809

[7] W. Wang, X. Mei, G. Jiang, S. Lei, C. Yang Effect of two typical focus positions on microstructure shape and morphology in femtosecond laser multi-pulse ablation of metals App.Surf. Sci. 255 (2008) 2303–2311

DOI: 10.1016/j.apsusc.2008.07.100

[8] B.R. Campbell, J.A. Palmer, and V.V. Semak, Peculiarity of metal drilling with a commercial femtosecond laser, App. Surf. Sci. 253(2007) 6334-6338.

DOI: 10.1016/j.apsusc.2007.01.063

[9] P. Mannion, J. Magee, E. Coyne, G.M. O'Connor, Ablation thresholds in ultrafast laser micro-machining of common metals in air, Opto-Ireland 2002: Optics and Photonics Technologies and Applications Editors, Proceedings of SPIE Vol. 4876 (2003) © 2003 SPIE · 0277-786X/03

DOI: 10.1117/12.463744

[10] B.K. Nayak, M.C. Gupta and K.W,. Kolasinski Formation of nano-textured conical microstructures in titanium metal surface by femtosecond laser irradiation Applied Physics A: Materials Science & Processing Vol. 90, (2008) No. 3, 399-402

DOI: 10.1007/s00339-007-4349-2

[11] C. B. Schaffer, A. Brodeur, J. F. Garcia, and E. Mazur, Micromachiningbulk glass by use of femtosecond laser pulses with nanojoule energy, Opt. Lett. 26(2001) 93–95

DOI: 10.1364/ol.26.000093

[12] J. Bonse and J. Krüger, Pulse number dependence of laser-induced periodic surface structures for femtosecond laser irradiation of silicon, J. Appl. Phys. 108(2010)

DOI: 10.1063/1.3456501

[13] M.von Allmen and A. Blatter, Laser-Beam Interactions with Matter, in Springer Series in Material Science, Vol. 2 (Springer, Berlin, 1995), 2nd ed.

[14] A. M. Streltsov and N. F. Borrelli, Fabrication and Analysis of a Directional Coupler Written in Glass by Nanojoule Femtosecond Laser Pulses, Opt. Lett. 26(2001) 42-43.

DOI: 10.1364/ol.26.000042

[15] A.Borowiec et al, Femtosecond laser micromachining of grooves in indium phosphide, Appl. Phys. A 79 (2004) 521–529

DOI: 10.1007/s00339-003-2377-0

[16] G. Chang, Y. Tu, Offline setting of the adjustable engineering parameters in ultra-fast laser micromachining under the low repetition rate pulses, submitted to ASME Journal of Micro- and Nano- Manufacturing (2012)

[17] T. Matsumura, T. Nakatani and T. Yagi, (2007) Deep drilling on a silicon plate with a femtosecond laser: experiment and model analysis Applied Physics A: Materials Science & Processing Vol. 86, No. 1 (2007) 107-114

DOI: 10.1007/s00339-006-3743-5

[18] Y. Suzaki and A. Tachibana, Measurement of the μm sized radiusof Gaussian laser beam using the scanning knife-edge, Appl. Opt. 14(1975) 2809−2810

DOI: 10.1364/ao.14.002809

[19] G. Chang ; Y. Tu,  The threshold intensity measurement in the femtosecond laser ablation by defocusing, Opt. and Las. in Eng., 50(2012) Issue 5, pp.767-771.

DOI: 10.1016/j.optlaseng.2011.12.010

[20] C. Chiccoli, S. Lorenzutta, G. Maino, Recent results for generalized exponential integrals". Computer Math. Applic. 19 (1990). (5): 21—29

DOI: 10.1016/0898-1221(90)90098-5

[21] G. Chang, Y. Tu, An effective focusing setting in femtosecond laser multiple pulse ablation submitted to Laser and Optical technology(2013)

DOI: 10.1016/j.optlastec.2013.04.025