The Research and Application Progress of Vanadium Dioxide Thin Films

Abstract:

The VO₂ thin film is a kind of functional material with phase transition properties, and has broad application prospects. In this paper, the main VO₂ thin film preparation methods of sputtering, chemical vapor deposition, sol-gel method and the research status of electrical properties, optical properties , phase change properties and the calculation theory study were summarized. The main application fields and application progress of the VO₂ thin films in the smart windows, the infrared pulse laser protective films, the photonic crystal, the dielectric material of CD, the material of optical and electrical switch were introduced.

• Periodical: Applied Mechanics and Materials (Volume 320)
• Pages: 287-295
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.320.287
• Online since: May 2013
• Authors: Jian Ping Long, Mi Jiang, Xin Li
• Keywords: Optical Property, Phase Transition, Research Progress, Thin Film, Vanadium Dioxide

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