The Improvement of Parameters of Manufacturing Process on Flexible Surface Acoustic Wave Device

Abstract:

This study issues the improvement of the parameters of manufacturing on the flexible SAW device. The better piezoelectric characteristics of ZnO film will be obtained. The Sol-Gel method is used to prepare the ZnO solution and deposits ZnO film by spin coating process. X-ray diffraction (XRD) and scanning electron microscope (SEM) are used to get the crystalline property. The results reveal that ZnO film possesses better crystalline property in 400RPM of spin speed. The piezoelectric intensity of (002) direction is 1566.67 (a.u.) and atomic morphology of ZnO film are exhibited by SEM image. This better ZnO film will enhance the wave propagation of surface acoustic wave (SAW) device. It can also expand the application of SAW device.

• Periodical: Applied Mechanics and Materials (Volumes 321-324)
• Pages: 532-535
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.321-324.532
• Online since: June 2013
• Authors: Tsung Chi Hsieh, Kuan Ju Chen, David T.W. Lin, Yang Der Juang, Yuh Chung Hu
• Keywords: Piezoelectric Material, SAW Sensor, Sol-Gel Method, ZnO Film

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